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S8552 Vacuum Ultraviolet VUV Monitoring SI Photodiode Sensor
Features
1. Improved reliability for excimer lasers (ArF: 193 nm, KrF: 248 nm)
2. Large photosensitive area 10 x 10 mm
3. Windowless package 16.5 x 15.0 mm ceramic package
Applications
1. Vacuum Uy monitor
2. Excimer laser monitor
Dark current | 0.05-1.0nA |
Terminal capacitance | 4.0-8.0nF |
Rise time | 9us |